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Axcelis Technologies Inc cash flow statement

In fiscal 2025, Axcelis Technologies Inc's operations generated $118m of cash; it spent $11.3m on capital projects, leaving free cash flow of $107m. It returned $121m through buybacks.

Cash flow statement

US$ millions unless shown otherwise. Fiscal years, plus the last twelve months (LTM) when newer.

Fiscal year2009Dec 20092010Dec 20102011Dec 20112012Dec 20122013Dec 20132014Dec 20142015Dec 20152016Dec 20162017Dec 20172018Dec 20182019Dec 20192020Dec 20202021Dec 20212022Dec 20222023Dec 20232024Dec 20242025Dec 2025LTMJun 2026
Cash from operations−34−64−11−15−1618−95647−147015021615714111875
Depreciation and amortisation7787555456810111213161818
Stock-based pay5454456568810121318212122
Capital spending012111237512791121121110
Free cash flow−34−71−11−16−1716−114942−266214120513612910766
Free cash flow after stock pay−39−11−3−15−20−2211−164334−34521291911181088644
Share buybacks——————————18850575260121—

Free cash flow is cash from operations minus capital spending. Free cash flow after stock pay also subtracts stock-based compensation, a real cost to shareholders that the cash flow statement adds back. Dividends, buybacks and shares issued are cash amounts for the period.

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Figures from Axcelis Technologies Inc's SEC filings (10-K and 10-Q), retrieved October 29, 2026. How we read and check them: methodology and data sources. Not investment advice. Back to Axcelis Technologies Inc.