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Entegris Inc cash flow statement

In fiscal 2025, Entegris Inc's operations generated $695m of cash; it spent $299m on capital projects, leaving free cash flow of $396m. It returned $60.8m in dividends.

Cash flow statement

US$ millions unless shown otherwise. Fiscal years, plus the last twelve months (LTM) when newer.

Entegris Inc: cash flow statement, annual
Fiscal year2009Dec 20092010Dec 20102011Dec 20112012Dec 20122013Dec 20132014Dec 20142015Dec 20152016Dec 20162017Dec 20172018Dec 20182019Dec 20192020Dec 20202021Dec 20212022Dec 20222023Dec 20232024Dec 20242025Dec 2025LTMSept 2026
Cash from operations4141157115109126121208293313382447400363645632695798
Depreciation and amortisation504137383984102100102127141137138135173188205156
Stock-based pay8881089111315172023306761666974
Capital spending131730506058726594110112132211466457316299182
Free cash flow−912412765496949142200202270315190−103188316396616
Free cash flow after stock pay−1711712055416038129184185250292160−170126250327542
Dividends paid——————0010404143445760616161
Share buybacks——00150082817480456700———
Shares issued57—————————————————

Free cash flow is cash from operations minus capital spending. Free cash flow after stock pay also subtracts stock-based compensation, a real cost to shareholders that the cash flow statement adds back. Dividends, buybacks and shares issued are cash amounts for the period.

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Figures from Entegris Inc's SEC filings (10-K and 10-Q), retrieved October 30, 2026. How we read and check them: methodology and data sources. Not investment advice. Back to Entegris Inc.